3D Optical Profilometers

3D Optical Profilometers

The Profilm3D® benchtop optical profiler and Zeta optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of optical profilers supports a variety of measurement techniques, including white light interferometry, True Color imaging and ZDot confocal grid structured illumination. KLA Instruments can help guide you to the right optical profiler solution for your unique measurement needs.

Upcoming Events

View All

Sunday, September 17 – Friday, September 22, 2023

ICSCRM

Tuesday, October 24 – Thursday, October 26, 2023

The Quality Show

Wednesday, October 25 – Friday, October 27, 2023

National Nanotechnology Coordinated Infrastructure

Tuesday, November 14 - Friday, November 17, 2023

SEMICON Europa

Tuesday, November 28 – Thursday, November 30, 2023

MRS Fall

Sunday, December 10 – Thursday, December 14, 2023

Materials in Nuclear Energy Systems

Sunday, December 17 – Thursday, December 21, 2023

7th International Indentation Workshop

 
Profilm3D Optical Profilometer

Filmetrics® Profilm3D® Optical Profilometer

The Profilm3D® benchtop optical profiler utilizes white light interferometry, TotalFocus® infinite depth-of-field imaging, or Enhanced Roughness Mode to provide easy, non-contact measurement of 3D step heights, roughness, and other surface topography.

Learn more

Zeta-20 Optical Profiler

Zeta-20 Optical Profiler

The Zeta-20 benchtop 3D non-contact optical profilometer features patented ZDot technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection. The High Resolution HR configuration is designed specifically for advanced solar applications.

Learn more

Zeta-300 Optical Profiler

Zeta-300 Optical Profiler

Building upon the proven performance of the Zeta-20, the Zeta-300 non-contact 3D optical profiler includes integrated vibration isolation and support for larger sample sizes to meet your R&D and production requirements.

Learn more

Zeta-388 Optical Profiler

Zeta-388 Optical Profiler

The Zeta-388 non-contact 3D optical profiler combines the Zeta-300 system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.

Learn more

Looking for stylus surface profilometers?

View More

Technical Literature

Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.

Explore

 

Timeline of Innovation

The history of the optical profiler portfolio of KLA Instruments™ is a story of innovation from diverse origins. ADE launched the MicroXAM interferometer. Zeta Instruments developed ZDot and multi-mode optical profilers. Filmetrics® introduced novel, general-purpose white-light interferometers. These products came together into a diverse portfolio of optical profilometers, now unified under the KLA Instruments brand. Learn more about our rich history of innovation and how our tools continue to evolve to support your surface metrology requirements.

Learn More

Receive the latest KLA Instruments news, papers, events, and more

Instruments Form
Data Transfer *
Marketing *

Follow KLA Instruments

Follow KLA Instruments to engage with our experts and learn about our tool applications.

Learn how our products can help you.

Explore More Solutions

KLA Instruments Logo

Instruments

For industry experts, academics and other innovators, KLA Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world’s breakthrough technologies.

Zeta-388 Optical Profiler

Defect Inspectors

The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.

Zeta-388 Optical Profiler

Nanoindenters

The KLA Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.

Zeta-388 Optical Profiler

Sheet Resistance Measurement

The Filmetrics® sheet resistance mapping instruments have been developed based on over 45 years of resistance measurement innovation and technical expertise.

Zeta-388 Optical Profiler

Stylus Profilers

The Alpha-Step®, Tencor P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.

Zeta-388 Optical Profiler

Thin-Film Thickness Reflectometers

The Filmetrics thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, with industry-leading precision.

 

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?


您已选择查看由Google翻译翻译的此网站。
KLA中国的内容与英文网站相同并改进了翻译。

你想访问KLA中国吗?

If you are a current KLA Employee, please apply through the KLA Intranet on My Access.

Exit