ECI
Chemistry Process Monitoring
ECI Technology provides chemistry process monitoring products that support chip manufacturing, including:
- Products that support online monitoring and precise control of wet metallization processes, including copper and cobalt metallization: https://www.ecitechnology.com/products/semiconductor/interconnects/
- A range of chemistry analyzers, from benchtop chemical monitoring systems to fully automated online monitors, that support critical etch and cleaning processes: https://www.ecitechnology.com/products/semiconductor/surface-preparation/