Technical Literature
Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments defect inspection and metrology products.
Instruments Articles
KLA Instruments™ Biomedical Solutions Protect Patients, Increase Yield for Manufacturers
Apr 4, 2023
In the biomedical industry, many different types of devices such as sensors, monitors, prosthetics, drug delivery systems and implants are...
Compound Semiconductor Innovation Advances EVs and Other Green Technologies
Apr 27, 2022
As the world works to reduce greenhouse gas emissions, global adoption of electric vehicles (EVs) is driving an increased demand...
Rougher Surfaces, Steeper Slopes – Navigating the High Performance Capability of the New Generation Filmetrics® Profilm3D®
Jan 25, 2022
The KLA Instruments™ portfolio of optical profiler tools are widely used in the industry due to their rapid measurement time...
Timeline of Innovation
Our history of innovation and deep expertise have built a broad portfolio of measurement and inspection solutions that address every requirement and environment. See how it all started from the inception of the Alpha-Step® product line in 1977 through our latest product innovations.
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