Certified & Remanufactured
Substrate Manufacturing
Surfscan® Series
Unpatterned Wafer Defect Inspection Systems
The Surfscan® unpatterned wafer inspection systems identify defects and surface quality issues that affect the performance and reliability of semiconductor devices. It supports IC, OEM, materials and substrate manufacturing by qualifying and monitoring tools, processes and materials, by quickly isolating surface defects.
Applications
Process qualification, Tool qualification, Tool monitoring, Outgoing wafer quality control, Incoming wafer quality control, Resist and scanner qualification, Process debug.
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